FB102

FB101

  Auto Curve Tracer.

  The fastest : 3mSec / pin at open / hort.

  The highest pin count : up to 4096 pins.

  DUT Board is easy, quick and cheap.

Up to 8” wafer.

Sub-micron rule solutions.

Aspect Ratio : more than 10

Up to 6” wafer.

Sub-micron rule solutions.

Aspect ratio : more than 10

Up to 3” wafer.

> 1 micron rule.

Can be Plasma Etching,then modify to RIE (to save cost)

Sulfic, Nitric , Mixed Acid

Sulfic, Nitric , Mixed Acid

1um accuracy Laser position
Auto Chip level adjustment
Full PC control